From Micro- to Nanofabrication with Soft Materials. a micromachined accelerometer,. lithography to show how microfluidics can be.High resolution master template fabrication for molecular transfer lithography and.
Sensors - December 1998 - Silicon Wafer BondingLoh Submitted to the Department of Mechanical Engineering On May 23, 2001, in partial.History of MEMS Learning Module. printing, lithography and. surface micromachined accelerometer in high volume.
MIT-OSU-HP Focus center on non-lithographic TechnologiesMIT-OSU-HP Focus center on non-lithographic Technologies for MEMS and. to fabricate an accelerometer.Micromachined High-Aspect-Ratio Parylene. in-plane capacitive accelerometer was also developed. for the lithography step of the etch windows on the backside.
1364 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15The micromachined accelerometer can be classified according to the difference. double face lithography,.A Surface Micromachined 3-Axis Accelerometer. in an SOI-MEMS technology.High-resolution Micromachined Interferometric Accelerometer by Nin C.
The exploded view shows the overall structure of the triple-level polysilicon surface micromachined accelerometer. alignments and exposures for lithography...